Our device manufacturer customers demand cutting edge solutions in a rapidly changing landscape. At SPT, we track trends and innovate based on evolving MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging industry needs.

Driven by each customer’s business case, we co-design and develop custom thermal process solutions to ensure your success.

SPT customizes vertical furnace products to target your specific oxidation, diffusion, LPCVD, and APCVD process needs. We help you leverage flexible configurations and a full range of substrates and wafer sizes for high throughput and low cost of ownership.