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RVP-300

RVP-300

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SPT Microtechnologies USA, Inc. (SPT) is a leading vertical batch furnace supplier for innovative MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers.

https://www.sptmicro.com/

RVP-300

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H4

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RVP-300

Features:

  • The RVP-300 Plus/550 is the industry’s production-proven 300mm furnace
  • Superior productivity
  • Full complement of APCVD and LPCVD process selections
  • Designed to occupy minimal fab space
  • Layout provides for multiple systems with zero side spacing required due to innovative packaging
  • Excellent accessibility for maintenance from rear
  • Enhanced Temperature Control
  • Utilizes fast ramping element and forced air cooling
  • Proprietary Advanced Temperature Control software to maximize throughput by minimizing the time to attain and cool from process temperature
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RVP-300plus and RVP-550 Rapid Vertical Processors for 200mm and 300mm wafers

Production-proven 300mm furnaces were introduced in the world’s first 300mm fab in 1999. Since then, we’ve continuously refined these products, which led to developing the RVP Ace.

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Applications

  • Wet/dry thermal oxide
  • Radical oxidation
  • Silicon Nitride (Stoichiometric and low stress)
  • TEOS, SiH4 and DCS-based SiO2
  • Doped (P, As, B) and un-doped polysilicon
  • Atomic Layer Deposition
  • Anneal and Cure : 100 to >1200°C
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