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SPT helps our customers design and implement systems with a commitment to value and quality.

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SPT Microtechnologies USA, Inc. (SPT) is a leading vertical batch furnace supplier for innovative MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers.

https://www.sptmicro.com/

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Building relationships and delivering superior support

We consistently provide world-class customer support for the AVP Ace, RVP Ace, AVP/RVP, RVP-300 and Watkins Johnson (WJ) APCVD products.

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Equipment and Parts Sales

SPTS Technologies is our exclusive global sales partner and represents SPT products. For equipment sales, please email sales@sptmicro.com.

SPT maintains an inventory of spare parts and consumables worldwide. For spare parts for your current or legacy machine, please email spares@sptmicro.com.

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Customer Support

Our service team is here to provide support for worldwide device manufacturers from our headquarters and manufacturing facility in the heart of Silicon Valley, CA, with local support in Germany and Taiwan and worldwide satellite locations.

SPT’s experienced field service team and applications engineers support:

  • Routine and preventive maintenance
  • Tool down repairs 
  • Software 
  • Service contracts 
  • System relocation
  • Process support and new applications development
  • Documentation for tools and software
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Have a different question?

SPT provides applications development and parts and system support for our entire portfolio of products. If you would like to contact us about another issue, please contact us.

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